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Universal H300

Universal H300 is a 12-inch CMP equipment developed based on HWATSING's independent intellectual property innovation technology,equipped with innovative polishing and cleaning units, it greatly improves production efficiency and polishing performance, increases process flexibility, and meets various process requirements. It is widely used in integrated circuits, advanced packaging, large silicon wafers and other manufacturing processes.

High WPH、high performance and high reliability

Multi-section polishing head

Dry-in and dry out

Satisfy mature process technology requirements

Used for CMP processes such as Oxide/SiN/STI/Poly/Cu/W

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